Dynamics analysis of width-varying microcantilevers: Interplay between eigenfrequencies, contact stiffness and interaction forces

In this study, the resonance-frequency dependence and modal sensitivity of flexural vibration modes overhang/T-shaped microcantilevers to interaction force surface stiffness variations were analysed, a closed-form expression was derived. The Euler–Bernoulli beam theory used develop models, characteristic formula representing cantilever frequencies on overhang dimensions obtained. results derived analysed using numerical simulations investigate compare effects width, length, repulsive attractive forces, contact mode cantilevers. Furthermore, for sensitivities width-varying derived, compared simulations. Finally, forces frequency response different cantilevers based their geometrical parameters verified experimentally. This study can open new paths designing, fabricating, in sensing imaging applications, particularly array systems.